SIERRA Instruments offers a wide variety of thermal mass flow controllers, fitting most gas control applications. The low-Flow analogue line covers flow rates from 0.05 - 1000 nl/min and offers products for high-Accuracy Applications as well as economical solutions for industrial meterruns.

Read more about the thermal mass flow metering principles in our technologies section.

Side-Trak® 840 Series Traditional Analog Mass Flow Controller

SIERRA Thermal Mass Flow Meter Controller

An accurate and reliable stainless steel MFM / MFC with a wide flow range. Accuracy of +/- 1% of full scale and flow ranges from 0-10 sccm to 0-5600 slpm.

Accuracy: of +/- 1% of full scale
Materials:316 stainless steel construction
Flow ranges: from 0-10 sccm to 0-5600 slpm
Direct monitoring of mass flow rate
“Primary Standard” calibration for best accuracy & NIST traceability
CE approved